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Nano machine for nanometer-level machining
Ultra NANO 100
Ultra NANO 100
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From a world of sub-micrometer to another of nanometers.
The world highest level of machining precision has been achieved thanks to motion control by a minimum unit of 0.07 nm (0.00000007 mm), made possible by integration of Sodick's core technologies.

Ultra NANO 100 is a nanometer-scale, ultra-high-precision machine specially developed for forming dies for optical machine components and the like, which require extremely high dimensional and surface accuracy.  Ultra-high-precision machining is realized through the control of the motion on linear axis by a unit of 0.07 nm.  One unit of Ultra Nano 100 can form dies for quite a wide variety of equipment such as diffraction gratings, light guide plates, spherical and non-spherical lenses and spherical/non-spherical micro-lens arrays.  Its functions include CAM, specialized in machining dies for lenses, that strongly supports manufacturing of dies for spherical/non-spherical micro-lens arrays.

Principal Fields of Application
Forming of dies for optical components for consumer use (optical disc devices, CCD cameras, imaging lenses for CMOS, light guide plates for liquid crystal display devices, etc.) and communication use (high-reliability lenses for optical transmission of electrical signals, etc.) and precision machining of components for bio-related and other machines.
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Main Features

  • Five-axis control as standard function
    Five-axis control of A and C axes in addition to X, Y and Z axes enables lathe machining by turning workpieces as well as machining with rotating tools such as end mills and grinders.
  • Motion control by minimum unit of 0.07 nm (0.00000007 mm)
    Use of ceramics for key structural components minimizes the thermal displacement of the machine to realize machining to an ultra-high precision.
  • Smooth axial drive and excellent response
    The combination of air bearings of ceramics with linear motors eliminates contact portions from drive systems to realize smooth, high-response, no-backlash and ultra-high-precision axial drive.
  • Maintenance-free design
    Unprecedented accuracy, both static and dynamic, has been realized and is maintained over a long period.
  • Active removal of vibration
    Active vibration-free equipment provided on X, Y and Z axes minimizes most of ground vibration and other external vibration, realizing excellent surface accuracy.
  • Precise control of air temperature (within ±0.01ºC)
    Precise control of the temperature of the air supplied to the production machine (within ±0.01ºC) enables machining to an ultra-high precision and with good reproducibility.

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Specification
Material of structural components Alumina ceramics
Guiding system X, Y, Z axes Static air guides of ceramics
A, C&R axes Static air bearings
Max. travel / revolution X, Y, Z axes 100 × 100 × 55mm
A axis 180º
C&R axis No limitation
Position detection X, Y, Z axes Linear scale: 0.07 nm
A axis Laser encoder: 453.6 million pulses/rotation
C axis Indexing: 151.2 million pulses/rotation
R axis Rotation: 1.21 million pulses/rotation
Travel/revolution speed X, Y, Z axes Quick feed, cutting feed: 3,000 mm/min
A axis 10min-1
C&R axis Indexing axis (C axis): 25 min-1
Rotating axis (R axis): 1000 min-1
Main axle Air turbine type static air spindle
50,000, 120,000 min-1
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Workpiece Samples
  Model Ultra NANO 100
Step machining in 5-nm difference
Workpiece Samples

Work Electroless Ni-P plating5 mm
Tool Mono crystal diamond cutting tool
Machining condition Tool feed Rough:100 nm
Finish:5 nm
Speed Rough: 1000 mm/min
Finish:300 min/min
Step 5.04nm












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Workpiece Samples

Workpiece Samples

  Model Ultra NANO 100
Machining V-groove of high grade
1. Top of slope
Workpiece Samples
Workpiece Samples
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  Top portion Bottom portion
Surface finish Max.
(P-V)
4.8nm 4.6nm
Average
(Ra)
0.7nm 0.7nm
Work Electroless Ni-P coating
Tool Trapezoidal bite of single crystal diamond
Workpiece Samples
 
2. Bottom of slope
Workpiece Samples
Workpiece Samples
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Workpiece Samples
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  Model NANO-100(Five-axis)
Smooth finishing surface without quadrant protrusion
Cylindrical shaped surface by interpolating arc above ZX surface.
Workpiece Samples
Workpiece Samples
Machining result
fitting
R=670 mm (design value)
34.9 nm
(P-V value)
5.4 nm
(R.M.S value)
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  Model NANO-100(Five-axis)
Achieves excellent straightness profile and pitch accuracy
Triangular prism array.
Workpiece Samples

Workpiece Samples
Workpiece Samples
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Work Electroless Ni-P coating
Shape 120º crosspitch of 20 µm
Tool V90º bite of single crystal diamond
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  Model NANO-100(Five-axis)
Aspheric microlens array using 4-axis simultaneous lathe turning
Machined using lens CAM for programming.
Workpiece Samples
Workpiece Samples
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Work Electroless
Ni-P coating
Method Simultaneous
four-axis lathing
Shape 4 × Φ0.25 mm
non-spherical

  Model NANO-100(Five-axis)
Grinding lens mold of cemented carbide
Workpiece Samples
Workpiece Samples
Work Fine-grain cemented carbide
Shape SR15
Tool #800 diamond wheel
Method Cross grinding
Max. finish PV 3.1nm
Average finish Ra 0.5nm
Contour accuracy ±20 nm
Workpiece Samples
Workpiece Samples
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*Sales model may differ depending on the market.
  Please contact your sales representative for details.
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