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Nano machine for nanometer-level machining
Ultra NANO 100

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From a world of sub-micrometer to another of nanometers.
The world highest level of machining precision has been achieved thanks to motion control by a minimum unit of 0.07 nm (0.00000007 mm), made possible by integration of Sodick's core technologies. |
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Ultra NANO 100 is a nanometer-scale, ultra-high-precision machine specially developed for forming dies for optical machine components and the like, which require extremely high dimensional and surface accuracy. Ultra-high-precision machining is realized through the control of the motion on linear axis by a unit of 0.07 nm. One unit of Ultra Nano 100 can form dies for quite a wide variety of equipment such as diffraction gratings, light guide plates, spherical and non-spherical lenses and spherical/non-spherical micro-lens arrays. Its functions include CAM, specialized in machining dies for lenses, that strongly supports manufacturing of dies for spherical/non-spherical micro-lens arrays.
Principal Fields of Application
Forming of dies for optical components for consumer use (optical disc devices, CCD cameras, imaging lenses for CMOS, light guide plates for liquid crystal display devices, etc.) and communication use (high-reliability lenses for optical transmission of electrical signals, etc.) and precision machining of components for bio-related and other machines. |
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- Five-axis control as standard function
Five-axis control of A and C axes in addition to X, Y and Z axes enables lathe machining by turning workpieces as well as machining with rotating tools such as end mills and grinders.
- Motion control by minimum unit of 0.07 nm (0.00000007 mm)
Use of ceramics for key structural components minimizes the thermal displacement of the machine to realize machining to an ultra-high precision.
- Smooth axial drive and excellent response
The combination of air bearings of ceramics with linear motors eliminates contact portions from drive systems to realize smooth, high-response, no-backlash and ultra-high-precision axial drive.
- Maintenance-free design
Unprecedented accuracy, both static and dynamic, has been realized and is maintained over a long period.
- Active removal of vibration
Active vibration-free equipment provided on X, Y and Z axes minimizes most of ground vibration and other external vibration, realizing excellent surface accuracy.
- Precise control of air temperature (within ±0.01ºC)
Precise control of the temperature of the air supplied to the production machine (within ±0.01ºC) enables machining to an ultra-high precision and with good reproducibility.
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| Material of structural components |
Alumina ceramics |
| Guiding system |
X, Y, Z axes |
Static air guides of ceramics |
| A, C&R axes |
Static air bearings |
| Max. travel / revolution |
X, Y, Z axes |
100 × 100 × 55mm |
| A axis |
180º |
| C&R axis |
No limitation |
| Position detection |
X, Y, Z axes |
Linear scale: 0.07 nm |
| A axis |
Laser encoder: 453.6 million pulses/rotation |
| C axis |
Indexing: 151.2 million pulses/rotation |
| R axis |
Rotation: 1.21 million pulses/rotation |
| Travel/revolution speed |
X, Y, Z axes |
Quick feed, cutting feed: 3,000 mm/min |
| A axis |
10min-1 |
| C&R axis |
Indexing axis (C axis): 25 min-1 |
| Rotating axis (R axis): 1000 min-1 |
| Main axle |
Air turbine type static air spindle 50,000, 120,000 min-1 |
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| Step machining in 5-nm difference |

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| Work |
Electroless Ni-P plating5 mm |
| Tool |
Mono crystal diamond cutting tool |
| Machining condition |
Tool feed |
Rough:100 nm |
| Finish:5 nm |
| Speed |
Rough: 1000 mm/min |
| Finish:300 min/min |
| Step |
5.04nm |
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Machining V-groove of high grade
1. Top of slope |

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Top portion |
Bottom portion |
| Surface finish |
Max. (P-V) |
4.8nm |
4.6nm |
Average (Ra) |
0.7nm |
0.7nm |
| Work |
Electroless Ni-P coating |
| Tool |
Trapezoidal bite of single crystal diamond |
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| 2. Bottom of slope |

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Model |
NANO-100(Five-axis) |
Smooth finishing surface without quadrant protrusion
Cylindrical shaped surface by interpolating arc above ZX surface. |

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Machining result
fitting |
R=670 mm (design value) |
34.9 nm (P-V value) |
5.4 nm (R.M.S value) |
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Model |
NANO-100(Five-axis) |
Achieves excellent straightness profile and pitch accuracy
Triangular prism array. |


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| Work |
Electroless Ni-P coating |
| Shape |
120º crosspitch of 20 µm |
| Tool |
V90º bite of single crystal diamond |
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Model |
NANO-100(Five-axis) |
Aspheric microlens array using 4-axis simultaneous lathe turning
Machined using lens CAM for programming. |

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| Work |
Electroless Ni-P coating |
| Method |
Simultaneous
four-axis lathing |
| Shape |
4 × Φ0.25 mm
non-spherical |
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Model |
NANO-100(Five-axis) |
| Grinding lens mold of cemented carbide |

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| Work |
Fine-grain cemented carbide |
| Shape |
SR15 |
| Tool |
#800 diamond wheel |
| Method |
Cross grinding |
| Max. finish |
PV 3.1nm |
| Average finish |
Ra 0.5nm |
| Contour accuracy |
±20 nm |
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*Sales model may differ depending on the market.
Please contact your sales representative for details.
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