Ultra-high-precision machine evolved through pursuit of nanometer-scale accuracy, realizing minimum driving distance of 10 nm
For the first time in the world, "EXC100L" is equipped with a totally no-contact X-Y orthogonal table with the Sodick-made air bearings, Ceramic Air Sliders, and linear motors.  Furthermore, its minimum driving distance of 10 nm, made possible through combination with a high-resolution linear scale, supports stable ultra-high-precision machining.  The optimum workmanship surpassing the expertise of veteran operators helps your manufacturing.

• Newly developed power unit, "LQW1"Power Supply, integrating 3-D solid models
  3-D solid models automatically define optimum machining conditions to enable unmanned operation and significant saving of manpower.
• Minimum table driving distance of 10 nm
  This model is equipped, for the first time in the world, with a totally no-contact X-Y orthogonal table with the Sodick-made air bearings, Ceramic Air Sliders, and linear motors.  What is more, the combination with a high-resolution linear scale realizes a minimum table driving distance of 10 nm.
• High-performance dielectric fluid cooler as standard equipment
  A high-performance dielectric fluid cooler provided as standard equipment supports stable ultra-high-precision machining.
• Ceramics applied to main structural components
  The linear-motor drive without ball screws that eliminates the torsion and wear of the drive system components and the ceramics applied to main structural components maintain high machining precision over a long period.